Location History:
- Chu-Tung, TW (2001)
- Longtan Township, TW (2016 - 2018)
Company Filing History:
Years Active: 2001-2018
Title: Chi-Yun Tseng: Innovator in Semiconductor Technology
Introduction
Chi-Yun Tseng is a prominent inventor based in Longtan, Taiwan. He has made significant contributions to the field of semiconductor technology, holding a total of 3 patents. His work focuses on improving processes related to wafer handling and etching, which are critical in semiconductor manufacturing.
Latest Patents
One of Chi-Yun Tseng's latest patents is titled "Methods for transporting wafers between wafer holders and chambers." This invention includes an apparatus that comprises a process chamber and a loadlock connected to the process chamber. The loadlock is designed to have a wafer holder that can store multiple wafers and transport them away from the loadlock efficiently. Another notable patent is "Semiconductor device and method of manufacture." This patent presents a system and method for etching a substrate, utilizing an inert carrier gas to introduce a liquid etchant. This approach helps prevent undesirable chemical reactions during the etching process, thereby reducing defects in the substrate and other structures.
Career Highlights
Chi-Yun Tseng is currently employed at Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His innovative work has positioned him as a key player in advancing semiconductor manufacturing techniques.
Collaborations
Throughout his career, Chi-Yun has collaborated with notable colleagues, including Shao-Yen Ku and Ming-Chien Wen. These collaborations have further enhanced the development of innovative solutions in semiconductor technology.
Conclusion
Chi-Yun Tseng's contributions to semiconductor technology through his patents and collaborations highlight his role as an influential inventor in the industry. His work continues to impact the efficiency and effectiveness of semiconductor manufacturing processes.