The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 12, 2018
Filed:
Dec. 01, 2011
Shao-yen Ku, Jhubei, TW;
Ming-jung Chen, Hsin-Chu, TW;
Tzu Yang Chung, Hsin-Chu, TW;
Chi-yun Tseng, Longtan Township, TW;
Rui-ping Chuang, Hsin-Chu, TW;
Shao-Yen Ku, Jhubei, TW;
Ming-Jung Chen, Hsin-Chu, TW;
Tzu Yang Chung, Hsin-Chu, TW;
Chi-Yun Tseng, Longtan Township, TW;
Rui-Ping Chuang, Hsin-Chu, TW;
Taiwan Semiconductor Manufacturing Company, Ltd., Hsin-Chu, TW;
Abstract
An apparatus comprises a process chamber, and a loadlock connected to the process chamber. The loadlock is configured to have a wafer holder disposed therein. The wafer holder is configured to store a plurality of wafers, and is configured to transport the plurality of wafers away from the loadlock.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile