Chi-Wu Chou

Title: Innovations of Chi-Wu Chou in Metal-Insulator-Metal Capacitor Technology

Introduction

Chi-Wu Chou is an accomplished inventor based in Hsin-Chu, Taiwan, known for his significant contributions to semiconductor technology. With a total of four patents to his name, Chou has focused on innovative solutions for enhancing the performance of metal-insulator-metal (MIM) capacitor structures in copper-CMOS circuits. His work has played a vital role in advancing the efficiency and reliability of electronic devices.

Latest Patents

Chi-Wu Chou's latest patents involve a novel MIM capacitor structure designed for use in copper-CMOS circuits. His patented method offers a metal-insulator-metal capacitor structure that incorporates a pad protect layer, providing significant advantages without the need for additional masks and metal layers. This innovative process enables the formation of a copper capacitor bottom metal (CBM) electrode while simultaneously creating pad contacts and levels of copper interconnections through the damascene process.

An insulating silicon nitride (SiN) metal protect layer is strategically formed on the copper, followed by the creation of a capacitor interelectrode dielectric layer. Utilizing a metal protecting buffer, Chou's method safeguards the thin interelectrode layer, allowing for precise etching to pad contacts and interconnecting lines. Furthermore, a TiN/AlCu/TiN metal layer is meticulously deposited and patterned to establish the capacitor top metal (CTM) electrodes and provide a protective layer on copper pad contacts. This inventive structure not only reduces the series resistance of the capacitor but also enhances its figure of merit Q, while effectively shielding copper from corrosion.

Career Highlights

Throughout his career, Chi-Wu Chou has collaborated with notable companies such as Taiwan Semiconductor Manufacturing Company (TSMC), a renowned leader in semiconductor manufacturing. His work at TSMC has allowed him to contribute significantly to advancements in semiconductor technology, particularly through his developments related to capacitor structures.

Collaborations

During his professional journey, Chou has also worked alongside talented individuals in the field, including Ssu-Pin Ma and Chun-Hon Chen. Their collaborative efforts have furthered the innovations in capacitor technology, significantly impacting the performance of electronic devices.

Conclusion

Chi-Wu Chou stands out as a key innovator in the field of semiconductor technology, with his impressive portfolio encompassing four patents that focus on improving MIM capacitor structures. His contributions not only enhance the efficiency of copper-CMOS circuits but also set a foundation for future advancements in the industry. Chou’s work continues to influence ongoing research and development within the semiconductor sector, underscoring the importance of innovation in technology.