Cheol-Kyu Bok

Title: Cheol-Kyu Bok: Innovator in Semiconductor Technology

Introduction

Cheol-Kyu Bok is a prominent inventor based in Ichon-shi, South Korea. He has made significant contributions to the field of semiconductor technology, holding a total of 4 patents. His work focuses on enhancing the performance and efficiency of semiconductor devices through innovative materials and methods.

Latest Patents

One of his latest patents is a cross-linking polymer for organic anti-reflective coating. This polymer improves the uniformity of ultra-fine photoresist patterns formed using a photolithography process with an ArF light source at a wavelength of 194 nm. The invention also includes an organic anti-reflective coating composition and a method for forming a photoresist pattern. The disclosed polymer prevents scattered reflection from the bottom film layer, eliminates standing wave effects due to variations in photoresist film thickness, and increases the uniformity of the photoresist pattern. Additionally, it enhances the etching velocity of the organic anti-reflective coating, facilitating easier removal.

Another significant patent relates to a semiconductor memory device and its fabrication method. This invention features a semiconductor memory device that includes more than two capacitors, which reduces the thickness of the insulation layer while increasing the size of each capacitor. The arrangement of the capacitors diagonally allows for a wider formation of each capacitor, thus addressing issues related to parasitic capacitance and leakage currents. Notably, this design eliminates the need for an additional reticle to form contact holes for each capacitor due to their inverted disposition.

Career Highlights

Cheol-Kyu Bok has worked with notable companies in the semiconductor industry, including Hynix Semiconductor Inc. and Hyundai Electronics Industries Co. Ltd. His experience in these organizations has contributed to his expertise in semiconductor technologies and innovations.

Collaborations

Throughout his career, Cheol-Kyu Bok has collaborated with talented individuals such as Seo-Min Kim and Cha-Won Koh. These collaborations have further enriched his work and contributed to advancements in the field.

Conclusion

Cheol-Kyu Bok is a distinguished inventor whose work in semiconductor technology has led to significant advancements in the industry. His innovative patents and contributions continue to shape the future of semiconductor devices.