Company Filing History:
Years Active: 2022-2025
Title: Innovations of Chengyu Liu in Physical Vapor Deposition Technology
Introduction
Chengyu Liu is an accomplished inventor based in San Jose, California. He has made significant contributions to the field of physical vapor deposition (PVD) technology, holding three patents that showcase his innovative approaches to material deposition and dielectric filling.
Latest Patents
One of Chengyu Liu's latest patents is titled "Pulsed Voltage Waveform Delivery for Deposition." This invention describes a method that includes sputtering material from a PVD target within a processing chamber. The sputtered material is filtered by an electrode, allowing a first portion to pass through apertures and deposit on a substrate. The method utilizes a pulsed voltage waveform to apply a pulsed DC bias, achieving an etch-to-deposition ratio greater than or equal to 0.5.
Another notable patent is "Methods for Seamless Gap Filling of Dielectric Material." This method focuses on achieving a seamless dielectric fill with high-k material for narrow features. It involves depositing a metal material into a feature on a substrate, utilizing a high ionization PVD process. The seamless metal gap fill is then treated to convert it into a seamless dielectric gap fill with high-k dielectric material.
Career Highlights
Chengyu Liu is currently employed at Applied Materials, Inc., a leading company in the semiconductor equipment industry. His work at Applied Materials has allowed him to develop and refine his innovative techniques in PVD technology.
Collaborations
Chengyu has collaborated with several talented individuals, including Ruitong Xiong and Bo Xie, who contribute to the advancement of technology in their respective fields.
Conclusion
Chengyu Liu's innovative patents and contributions to physical vapor deposition technology highlight his expertise and commitment to advancing the semiconductor industry. His work continues to influence the development of new materials and processes, showcasing the importance of innovation in technology.
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