Location History:
- Hsinchu, TW (2006)
- Hsing-chu, TW (2011)
Company Filing History:
Years Active: 2006-2011
Title: Cheng-Liang Chang: Innovator in Semiconductor Technology
Introduction
Cheng-Liang Chang is a prominent inventor based in Hsing-Chu, Taiwan. He has made significant contributions to the field of semiconductor technology, holding a total of 2 patents. His work focuses on advanced processes that enhance the efficiency and effectiveness of semiconductor manufacturing.
Latest Patents
Cheng-Liang Chang's latest patents include innovative technologies that address critical challenges in semiconductor fabrication. One of his notable patents is for a "High aspect ratio gap fill application using high density plasma chemical vapor deposition." This process involves exciting a gas mixture to create a plasma that includes ions. The plasma is directed into a dense region above the upper surface of the semiconductor wafer, where it heats the wafer using an additional heat source. This allows material from the plasma to deposit onto the semiconductor wafer effectively.
Another significant patent is for an "Electrostatic chuck assembly having disassembling device." This invention features a disassembling device designed to separate a pedestal, a ceramic element, and a base from an electrostatic chuck assembly. The device includes a main body with a through hole and at least one pushing element that penetrates the through hole to push against the ceramic element and pedestal, facilitating their separation from the base.
Career Highlights
Cheng-Liang Chang is currently employed at Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His work at this prestigious company has allowed him to contribute to groundbreaking advancements in semiconductor technology.
Collaborations
Throughout his career, Cheng-Liang has collaborated with notable colleagues, including Joung-Wei Liou and Tsang-Yu Liu. These collaborations have further enriched his work and contributed to the development of innovative solutions in the semiconductor field.
Conclusion
Cheng-Liang Chang is a distinguished inventor whose contributions to semiconductor technology have made a significant impact on the industry. His innovative patents and work at Taiwan Semiconductor Manufacturing Company Limited highlight his expertise and commitment to advancing technology.