The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 05, 2006
Filed:
Oct. 29, 2003
Cheng-liang Chang, Hsinchu, TW;
Ray Chuang, Taipei, TW;
Jen Wei, Chia-I, TW;
Chian-kuo Huang, Hsinchu, TW;
Huan-wen Lai, Changhua County, TW;
Ching-sun Lee, Junghe, TW;
Cheng-yua Chuang, Kaohsiung, TW;
Chi-ching Lo, Hsinchu, TW;
Neo-feng Chiou, Taichung County, TW;
Yen-bo Huang, Taipei, TW;
Cheng-Liang Chang, Hsinchu, TW;
Ray Chuang, Taipei, TW;
Jen Wei, Chia-I, TW;
Chian-Kuo Huang, Hsinchu, TW;
Huan-Wen Lai, Changhua County, TW;
Ching-Sun Lee, Junghe, TW;
Cheng-Yua Chuang, Kaohsiung, TW;
Chi-Ching Lo, Hsinchu, TW;
Neo-Feng Chiou, Taichung County, TW;
Yen-Bo Huang, Taipei, TW;
Taiwan Semiconductor Manufacturing Co,, Ltd., Hsinchu, TW;
Abstract
A disassembling device for separating a pedestal, a ceramic element and a base from an electrostatic chuck assembly. The base has a first end surface and a second end surface. The ceramic element is disposed on the first end surface. The pedestal is disposed on the ceramic element. The disassembling device includes a main body and at least one pushing element. The main body is disposed on the second end surface and has a through hole. The at least one pushing element penetrates the through hole and pushes against the ceramic element and pedestal to separate the ceramic element and pedestal from the first end surface of the base.