This inventor holds 13 USPTO granted patents. Top assignee: Taiwan Semiconductor Manufacturing Comp. Ltd.. Active years: 2017-2025.
Company Filing History:
Years Active: 2017-2025
Title: Cheng-Chieh Chen: Innovator in Semiconductor Technology
Introduction
Cheng-Chieh Chen is a prominent inventor based in Tainan, Taiwan. He has made significant contributions to the field of semiconductor technology, holding a total of 13 patents. His innovative work focuses on enhancing the efficiency and effectiveness of exposure modules and cleaning systems used in semiconductor manufacturing.
Latest Patents
One of his latest patents is an exposure module with a cleaning scrubber. This exposure module includes a light source, a photomask situated optically downstream of the light source, and a wafer table that contains a plurality of silicon carbide (SiC) crystalline structures separated by trenches. The module is equipped with a cleaning scrubber designed to clean the wafer table effectively. The cleaning scrubber features a circular surface and microstructures that taper from a first width to a second width, ensuring that it can clean the wafer table without damaging the SiC crystalline structures.
Another notable patent is a surface clean system and method. This invention involves a portable handheld cleaning device capable of cleaning the surface of the substrate table without causing any damage. The device includes a base with a hollow structure and a grinding pad on the second side, featuring a cleaning surface with pyramid-shaped grits that enhance its cleaning capabilities.
Career Highlights
Cheng-Chieh Chen works at Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His role involves developing innovative solutions that improve manufacturing processes and product quality. His expertise in semiconductor technology has positioned him as a key player in the field.
Collaborations
Cheng-Chieh has collaborated with notable colleagues, including Li-Jui Chen and Hsin-Liang Chen. These collaborations have fostered a creative environment that encourages innovation and the development of cutting-edge technologies.
Conclusion
Cheng-Chieh Chen's contributions to semiconductor technology through his patents and work at Taiwan Semiconductor Manufacturing Company Limited highlight his role as an influential inventor. His innovative solutions continue to shape the future of the semiconductor industry.