Chen-Yu Shyu

Title: Chen-Yu Shyu: Innovator in Semiconductor Technology

Introduction

Chen-Yu Shyu is a prominent inventor based in Taipei, Taiwan. He has made significant contributions to the field of semiconductor technology, holding a total of 2 patents. His work focuses on innovative methods and structures that enhance the performance and efficiency of integrated circuits.

Latest Patents

Chen-Yu Shyu's latest patents include an interconnect structure and a method of forming the same. This interconnect structure features a damascene structure, an inter-metal dielectric (IMD), a dielectric block, and a metal via. The IMD layer is positioned over the damascene structure, while the dielectric block is embedded within the IMD layer, exhibiting different etch selectivity compared to the IMD layer. The metal via connects the damascene structure through the IMD layer and the dielectric block, facilitating electrical connections.

Another notable patent involves methods of fabricating integrated circuit devices that have reduced line end spaces. This method encompasses the deposition of a dielectric layer and a first hard mask layer sequentially over a substrate. It also includes the formation of a patterned second hard mask on the first hard mask layer, followed by the creation of a third hard mask portion within an opening of the patterned second hard mask. The process continues with the removal of the patterned second hard mask, etching the first hard mask layer, and using the patterned first hard mask as an etching mask to form trenches in the dielectric layer, which are then filled with a conductive material to create conductive lines.

Career Highlights

Chen-Yu Shyu is currently employed at Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His work at this company has allowed him to contribute to cutting-edge technologies that drive advancements in electronic devices.

Collaborations

Throughout his career, Chen-Yu has collaborated with notable colleagues, including Jye-Yen Cheng and Ming-Shuoh Liang. These collaborations have fostered innovation and have been instrumental in the development of new technologies in the semiconductor field.

Conclusion

Chen-Yu Shyu is a distinguished inventor whose work in semiconductor technology has led to significant advancements in integrated circuit fabrication. His innovative patents and contributions to Taiwan Semiconductor Manufacturing Company Limited highlight his role as a key player in the industry.