Chen-Liang Chang

Title: **The Innovative Contributions of Chen-Liang Chang in Semiconductor Technology**

Introduction

Chen-Liang Chang is a notable inventor based in New Taipei, Taiwan, recognized for his contributions to the semiconductor industry. With a total of two patents to his name, his work primarily focuses on advancements in wafer handling and cleaning technologies, which are crucial for improving the efficiency and quality of semiconductor manufacturing processes.

Latest Patents

Chang's latest patents include a **Wafer Support Device and Method for Removing Lift Pin Therefrom** and a **Method and System for Cleaning Wafer and Scrubber**.

The **Wafer Support Device** comprises a susceptor characterized by its bottom and top surfaces designed to support a wafer. The innovative design incorporates a lift pin that is at least partially telescopic within a through hole in the susceptor, which enhances the capability to manipulate wafers efficiently during processing.

The **Method and System for Cleaning a Wafer** introduces an effective approach to maintaining wafer cleanliness in semiconductor fabrication. It involves utilizing a wafer scrubber submerged in an agitated cleaning fluid, creating optimal conditions for effective cleaning while ensuring that both the scrubber and the wafer receive meticulous care throughout the process.

Career Highlights

Chen-Liang Chang is associated with Taiwan Semiconductor Manufacturing Company Limited, a leading entity in the semiconductor fabrication industry. His work at this prestigious company has significantly influenced the development of new techniques and devices that enhance manufacturing precision and productivity.

Collaborations

Throughout his career, Chang has collaborated with distinguished colleagues, including Zong-Han Hu and Yu-Shan Shih. These partnerships have fostered an environment of innovation, leading to the successful development of technologies that address critical challenges in semiconductor production.

Conclusion

Chen-Liang Chang stands out as an inventive mind driving advancements in the semiconductor sector. His patents not only reflect his ingenuity but also contribute to the ongoing evolution of semiconductor technologies, enhancing efficiency and effectiveness in the industry. As he continues his work, the impact of his inventions will likely resonate within the field for years to come.