Changling Li

Title: Innovations by Changling Li: Pioneering Advancements in Deposition Technology

Introduction

Changling Li is a notable inventor based in Sunnyvale, CA, who has made significant contributions to the field of deposition technologies. With a total of three patents to his name, Li is recognized for his innovative approaches that enhance efficiency and quality in semiconductor manufacturing processes.

Latest Patents

Li's recent patents include a "Deposition Chamber System Diffuser with Increased Power Efficiency." This invention features a diffuser constructed from a diffuser block, with both front-side and back-side gradient surfaces. The design incorporates unique opening structures that consist of conical and cylindrical openings, which are strategically arranged in alternating rows to optimize performance.

Another remarkable patent is the method of "Sequential Deposition and High Frequency Plasma Treatment of Deposited Film on Patterned and Un-Patterned Substrates." This technique focuses on the formation of high-quality silicon nitride films. It employs a two-step process where a silicon nitride film is deposited in a first processing volume, followed by treatment in a second processing volume using high-frequency plasma. The specifications include maintaining a sheath potential of less than 100 V and adjusting power density to achieve optimal results.

Career Highlights

Changling Li is currently associated with Applied Materials, Inc., a leading company in the semiconductor and equipment sector. His work continues to push the boundaries of technology, combining innovative deposition methods with practical applications in the industry.

Collaborations

Li has collaborated with fellow innovators such as Vinayak Veer Vats and Hang Yu. These partnerships have enabled the exchange of ideas and expertise, further enriching their collective contributions to the field of semiconductor technologies.

Conclusion

Changling Li's work exemplifies the spirit of innovation and dedication within the field of deposition technologies. His patents not only reflect his ingenuity but also advance the capabilities of semiconductor manufacturing. As the industry evolves, inventors like Li play a crucial role in shaping the future of technology through their creative and practical inventions.