The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 05, 2024
Filed:
Oct. 19, 2021
Applied Materials, Inc., Santa Clara, CA (US);
Changling Li, Santa Clara, CA (US);
Lai Zhao, Campbell, CA (US);
Gaku Furuta, Sunnyvale, CA (US);
Soo Young Choi, Fremont, CA (US);
Robin L. Tiner, Santa Cruz, CA (US);
David Atchley, Livermore, CA (US);
Ganesh Babu Chandrasekaran, Santa Clara, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A diffuser includes a front-side gradient surface formed from a diffuser block, a back-side gradient surface formed from the diffuser block, and opening structures formed from the front-side gradient surface to the back-side gradient surface. Each opening structure includes a conical opening having a first end along the front-side gradient surface and a second end corresponding to an apex at a depth within the diffuser block, and a cylindrical opening formed from the depth to the back-side gradient surface. The opening structures are arranged in rows including a first set of rows and a second set of rows alternately positioned along a length of the diffuser block.