Chang-gyu Kim

Title: Chang-gyu Kim: Innovator in Semiconductor Technology

Introduction

Chang-gyu Kim is a prominent inventor based in Kyungki-do, South Korea. He has made significant contributions to the field of semiconductor technology, holding a total of 6 patents. His work focuses on methods that enhance the manufacturing processes of semiconductor devices, particularly in achieving planar surfaces.

Latest Patents

One of his latest patents is a method for planarizing a semiconductor substrate. This innovative approach utilizes a difference in etch selectivity of insulators on the semiconductor substrate. The method involves wet-etching the second and first insulating layers at the upper edges of the elevated region until portions of the first insulating layer are exposed. A third insulating layer is then formed on the first and second insulating layers, followed by wet-etching the third and second insulating layers until the upper surface of the first insulating layer is exposed. This technique ensures that the semiconductor substrate has an even surface, which is crucial for device performance.

Another notable patent by Chang-gyu Kim is a method for manufacturing a semiconductor device capable of improving the integration of DRAM and logic regions. This method minimizes the step difference between these regions by forming a capacitor in the DRAM cell region and a metal interconnection in the logic region. The metal interconnection is designed to have a height similar to that of the capacitor, allowing for effective planarization of the second insulating layer, even when only either a CMP or etch back process is used.

Career Highlights

Chang-gyu Kim is currently employed at Samsung Electronics Co., Ltd., a leading company in the semiconductor industry. His work has been instrumental in advancing the technology used in semiconductor devices, contributing to the company's reputation for innovation and quality.

Collaborations

Throughout his career, Chang-gyu Kim has collaborated with talented individuals such as Min-su Baek and Ji-hyun Choi. These collaborations have fostered a creative environment that has led to the development of groundbreaking technologies in the semiconductor field.

Conclusion

Chang-gyu Kim's contributions to semiconductor technology through his innovative patents and collaborations highlight his role as a key figure in the industry. His work continues to influence the advancement of semiconductor manufacturing processes, ensuring the development of more efficient and effective devices.