Chan Soo Hwang

Title: The Innovative Contributions of Chan Soo Hwang in Extreme Ultraviolet Lithography

Introduction: Chan Soo Hwang is a prominent inventor based in Yongin-si, Korea, who has made significant strides in the field of extreme ultraviolet (EUV) lithography. With a remarkable record of 48 patents, his inventions continue to shape the landscape of photolithographic technology, which is crucial for semiconductor manufacturing.

Latest Patents: Hwang's latest patents include groundbreaking technologies such as an extreme ultraviolet lithography device and a method of operating this device. The first patent outlines an innovative operating method where a target image is defined to render an illumination system. This process involves assigning priorities to the positions of facets of a pupil facet mirror and utilizing linear programming for optimal mirror assignment. Additionally, it generates an illumination system by selecting facets based on a symmetry criterion, which enhances the performance of EUV scanners.

Another significant patent from Hwang is an EUV photomask that features a main area and a scribe lane area, designed to reflect EUV light effectively. This invention incorporates a reflective multilayer film with an absorption pattern. The scribe lane area, consisting of first and second lanes, includes unique sub-lanes that utilize dummy patterns, enabling precise light exposure in negative tone photoresists and exceeding threshold doses for accuracy in semiconductor fabrication.

Career Highlights: Hwang is currently associated with Samsung Electronics Co., Ltd., where he leverages his expertise in lithography to contribute to the company's advancements in semiconductor technology. His role has positioned him at the forefront of innovation, fostering developments that are pivotal to the industry.

Collaborations: Throughout his career, Hwang has collaborated with notable colleagues, including Seungyoon Lee and Jae-hee Kim. Together, they work on various projects that push the boundaries of technology in semiconductor production, showcasing the strength of teamwork in driving innovation.

Conclusion: Chan Soo Hwang stands out as a leading inventor in the semiconductor field, with his extensive portfolio of patents highlighting his contributions to extreme ultraviolet lithography. His inventions not only refine existing technologies but also pave the way for future advancements, ensuring a bright future for the semiconductor industry.