Company Filing History:

9 out of 164,108

International Business Machines Corporation

1 out of 832,680

Other

patents

Years Active: 2002-2018

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12 patents (USPTO):Sort by Forward Citations

Abstract keywords

1. 9972548 - FinFET electrical characterization with enhanced hall effect and probe (2018-05-15),

2. 9831136 - Film thickness metrology (2017-11-28),

3. 9459226 - Lens coating/contamination electronic detection (2016-10-04),

4. 9263348 - Film thickness metrology (2016-02-16),

5. 9224661 - Film thickness metrology (2015-12-29),

6. 9116038 - Integrated optical illumination reference source (2015-08-25),

7. 8990961 - Non-linearity determination of positioning scanner of measurement tool (2015-03-24),

8. 8037736 - Non-linearity determination of positioning scanner of measurement tool (2011-10-18),

9. 7508511 - Method and apparatus for improved ellipsometric measurement of ultrathin films (2009-03-24),

10. 7394539 - Method and apparatus for improved ellipsometric measurement of ultrathin films (2008-07-01),

11. 7280209 - Method and apparatus for improved ellipsometric measurement of ultrathin films (2007-10-09),

12. 6462817 - Method of monitoring ion implants by examination of an overlying masking material (2002-10-08),

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For the Inventor, By the Inventor

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Company Filing History:

Years Active: 2002-2018