The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9459226 B1

PDF
Full Text
Expired
Date of Patent:
Oct. 04, 2016

Filed:

Sep. 12, 2013
Applicant:

International Business Machines Corporation, Armonk, NY (US);

Inventor:

Carlos Strocchia-Rivera, Highland, NY (US);

Assignee:

GLOBALFOUNDRIES INC., Grand Cayman, KY;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G01R 27/26 (2006.01); G01N 27/24 (2006.01); G01N 27/22 (2006.01); G01N 27/20 (2006.01); G01N 21/55 (2014.01); G01N 21/15 (2006.01);
U.S. Cl.
CPC ...
G01N 27/24 (2013.01); G01N 27/22 (2013.01); G01N 21/55 (2013.01); G01N 27/20 (2013.01); G01N 2021/155 (2013.01);
Abstract

A contamination detection apparatus may include an optical element having an outer surface and an other surface opposing the outer surface, a first capacitor plate located on the outer surface at an outer periphery of the optical element, and a second capacitor plate located on the outer surface at the outer periphery of the optical element. The second capacitor plate is located adjacent the first capacitor plate and separated from the first capacitor by a gap to form a capacitor, whereby a contaminant is electrically detected based on the contaminant entering the gap and varying a capacitance value corresponding to the capacitor.


Find Patent Forward Citations

Strocchia-Rivera, Carlos. (2016). Lens coating/contamination electronic detection (U.S. Patent No. 9459226). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9459226

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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