Company Filing History:
3 out of 13,684 
2 out of 8,679 
Years Active: 2019-2024
Title: Byung Seok Kwon: Innovator in Plasma-Enhanced Chemical Vapor Deposition
Introduction
Byung Seok Kwon is a notable inventor based in San Jose, CA, with a focus on advancements in chemical vapor deposition technologies. He holds a total of 5 patents, showcasing his contributions to the field of materials science and engineering.
Latest Patents
One of his latest patents is titled "Plasma-enhanced chemical vapor deposition of carbon hard-mask." This invention describes a method for depositing a carbon hard-mask material using plasma-enhanced chemical vapor deposition (PECVD). The process involves heating a substrate within a process chamber to temperatures ranging from about 100°C to about 700°C while producing a plasma with an RF power generator emitting greater than 3 kW. The method also includes flowing a hydrocarbon precursor into the plasma, resulting in the formation of a carbon hard-mask layer on the substrate at rates exceeding 5,000/min, potentially reaching up to 10,000/min or faster.
Another significant patent is "Heated pedestal design for improved heat transfer and temperature uniformity." This invention relates to a pedestal designed to enhance temperature uniformity for substrates supported on it. The pedestal features a body with an embedded heater and a patterned surface that includes two regions of posts at different heights, ensuring a coplanar upper surface that defines a substrate receiving surface.
Career Highlights
Throughout his career, Byung Seok Kwon has worked with prominent companies such as Applied Materials, Inc. and Seagate Technology Incorporated. His experience in these organizations has contributed to his expertise in the field of chemical vapor deposition and materials engineering.
Collaborations
He has collaborated with notable professionals in the industry, including Prashant Kumar Kulshreshtha and Vinay K Prabhakar. These collaborations have likely enriched his work and led to innovative solutions in his field.
Conclusion
Byung Seok Kwon's contributions to the field of plasma-enhanced chemical vapor deposition and his innovative patents highlight his role as a significant inventor in materials science. His work continues to influence advancements in technology and engineering.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.