The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 28, 2023
Filed:
Dec. 04, 2019
Applied Materials, Inc., Santa Clara, CA (US);
Venkata Sharat Chandra Parimi, Santa Clara, CA (US);
Zubin Huang, Santa Clara, CA (US);
Jian Li, Fremont, CA (US);
Satish Radhakrishnan, San Jose, CA (US);
Rui Cheng, Santa Clara, CA (US);
Diwakar N. Kedlaya, San Jose, CA (US);
Juan Carlos Rocha-Alvarez, San Carlos, CA (US);
Umesh M. Kelkar, Santa Clara, CA (US);
Karthik Janakiraman, San Jose, CA (US);
Sarah Michelle Bobek, Sunnyvale, CA (US);
Prashant Kumar Kulshreshtha, San Jose, CA (US);
Vinay K. Prabhakar, Cupertino, CA (US);
Byung Seok Kwon, San Jose, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Embodiments of the present disclosure generally relate to a pedestal for increasing temperature uniformity in a substrate supported thereon. The pedestal comprises a body having a heater embedded therein. The body comprises a patterned surface that includes a first region having a first plurality of posts extending from a base surface of the body at a first height, and a second region surrounding the central region having a second plurality of posts extending from the base surface at a second height that is greater than the first height, wherein an upper surface of each of the first plurality of posts and the second plurality of posts are substantially coplanar and define a substrate receiving surface.