Location History:
- Kyungki-do, KR (1998 - 1999)
- Yongin-si, KR (2018 - 2020)
Company Filing History:
Years Active: 1998-2020
Title: Innovations by Byeonghwan Jeon
Introduction
Byeonghwan Jeon is a prominent inventor based in Yongin-si, South Korea. He has made significant contributions to the field of inspection and metrology processes, holding a total of 6 patents. His work primarily focuses on developing advanced apparatuses and methods that enhance the efficiency and accuracy of semiconductor manufacturing.
Latest Patents
One of his latest patents is an "Apparatus for and method of performing inspection and metrology process." This invention includes a stage designed to load a substrate, a sensor positioned on the stage, and an object lens that facilitates the transmission of illumination light to the substrate. The apparatus also features a first band filtering part and a second band filtering part, which control the wavelength of the illumination light within specified bandwidths.
Another notable patent is the "Inspection apparatus, semiconductor device manufacturing system including the same, and method of manufacturing a semiconductor device using the same." This invention comprises a light source device that provides incident light to a substrate, an objective lens for receiving reflection light, and a light splitting device positioned above the objective lens. Additionally, it includes first and second optical sensors and spatial filters that transmit reflection light in different forms.
Career Highlights
Byeonghwan Jeon is currently employed at Samsung Electronics Co., Ltd., where he continues to innovate and contribute to the semiconductor industry. His expertise in inspection technologies has positioned him as a key player in the development of advanced manufacturing systems.
Collaborations
He has collaborated with notable colleagues, including Kwang Soo Kim and Sangbong Park, to further enhance the capabilities of their projects and inventions.
Conclusion
Byeonghwan Jeon's contributions to the field of inspection and metrology processes have significantly impacted semiconductor manufacturing. His innovative patents and collaborative efforts continue to drive advancements in technology.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.