The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 13, 2018
Filed:
Jul. 25, 2016
Samsung Electronics Co., Ltd., Suwon-si, Gyeonggi-do, KR;
Kwang Soo Kim, Pyeongtaek-si, KR;
Taejoong Kim, Hwaseong-si, KR;
Byeonghwan Jeon, Yongin-si, KR;
Yongsuk Choi, Hwaseong-si, KR;
Youngduk Kim, Seongnam-si, KR;
Taeseok Oh, Suwon-si, KR;
SangYun Lee, Suwon-si, KR;
Yong-Ho Choi, Hwaseong-si, KR;
Abstract
An optical inspection apparatus includes an inspection target unit on which an inspection target is loaded, an illumination optical unit configured to irradiate incident light to the inspection target, an objective lens unit disposed between the illumination optical unit and the inspection target unit, a detection optical unit configured to receive reflective light reflected from the inspection target to thereby detect a presence or absence of a defect on the inspection target, and a control unit configured to control the illumination optical unit and the detection optical unit. The illumination optical unit includes a light source part configured to irradiate the incident light, and a spatial filter array configured to modify a transmission region of the incident light irradiated from the light source part. The spatial filter array includes a spatial filter part, and a filter movement part configured to move the spatial filter part.