Company Filing History:
Years Active: 2014-2017
Title: Bruno Thome: Innovator in Microlithography
Introduction
Bruno Thome is a distinguished inventor based in Aalen, Germany. He has made significant contributions to the field of microlithography, particularly in the development of advanced projection exposure apparatuses and illumination systems. With a total of three patents to his name, Thome's work has had a profound impact on the production of large-scale integrated electrical circuits and microstructured components.
Latest Patents
Thome's latest patents include a microlithographic projection exposure apparatus. This invention focuses on enhancing the coatings of optical elements to either increase or reduce reflectivity, which is crucial for the efficiency of microlithographic processes. Another notable patent is for a microlithographic illumination system. This system features a light distribution device capable of generating a two-dimensional intensity distribution in an illumination plane. It incorporates a first raster array of optical elements that creates a raster array of secondary light sources. Additionally, the system includes a device that can influence the intensity, phase, and beam direction of the illumination light, allowing for a defined variation in illumination intensity across the field.
Career Highlights
Bruno Thome is currently employed at Carl Zeiss SMT GmbH, a leading company in the field of optical systems and microlithography. His work at Zeiss has positioned him as a key player in advancing technologies that are essential for modern electronics manufacturing.
Collaborations
Thome has collaborated with notable colleagues, including Markus Deguenther and Michael Layh. Their combined expertise has contributed to the innovative developments in microlithography and optical systems.
Conclusion
Bruno Thome's contributions to microlithography through his patents and work at Carl Zeiss SMT GmbH highlight his role as a significant innovator in the field. His inventions continue to influence the production of advanced electronic components, showcasing the importance of innovation in technology.