Company Filing History:

3 out of 528

Kla Corporation

patents

1 out of 1,787

Kla Tencor Corporation

patents

Years Active: 2017-2025

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4 patents (USPTO):Sort by Forward Citations

Abstract keywords

1. 12474557 - Automated focusing system for tracking specimen surface with a configurable focus offset (2025-11-18),

2. 11592653 - Automated focusing system for tracking specimen surface with a configurable focus offset (2023-02-28),

3. 11356594 - Tilted slit confocal system configured for automated focus detection and tracking (2022-06-07),

4. 9615439 - System and method for inhibiting radiative emission of a laser-sustained plasma source (2017-04-04),

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Company Filing History:

Years Active: 2017-2025