Company Filing History:
Years Active: 2024
Title: Brian Pfeifer: Innovator in Virtual Metrology
Introduction
Brian Pfeifer is a notable inventor based in Hopewell Junction, NY (US). He has made significant contributions to the field of virtual metrology, particularly in optimizing seasoning processes for plasma tools. His innovative approach has the potential to enhance the efficiency and accuracy of manufacturing processes.
Latest Patents
Brian Pfeifer holds a patent for a method titled "Virtual metrology model based seasoning optimization." This patent describes a process for detecting the endpoint of a seasoning process for a plasma tool. The method involves operating the plasma tool to run a seasoning recipe on at least one seasoning wafer before running a monitoring recipe on at least one monitoring wafer. While running the monitoring recipe, monitoring data is collected, and an estimated product parameter is generated using a virtual metrology (VM) model. This model is designed to estimate product parameters based on production data associated with running a production recipe on production wafers. The endpoint of the seasoning process is determined when the estimated product parameter stabilizes.
Career Highlights
Brian Pfeifer is currently employed at Tokyo Electron Limited, a leading company in the semiconductor manufacturing industry. His work focuses on improving the efficiency of plasma tools through innovative metrology solutions. With his expertise, he has contributed to advancements that benefit the manufacturing sector.
Collaborations
Throughout his career, Brian has collaborated with talented professionals, including Jun Shinagawa and John Solis. These collaborations have fostered an environment of innovation and have led to the development of cutting-edge technologies in the field.
Conclusion
Brian Pfeifer's contributions to virtual metrology and seasoning optimization highlight his role as an influential inventor in the semiconductor industry. His innovative methods and collaborative efforts continue to drive advancements in manufacturing processes.