Average Co-Inventor Count = 6.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Tokyo Electron Limited (1 from 10,366 patents)
2. Benedict, Charles (0 patent)
3. Lackinger, Richard (0 patent)
4. Pfeifer, Brian (0 patent)
5. Dobbs, James (0 patent)
6. Yates, Christian (0 patent)
7. Bladen, Scott (0 patent)
1 patent:
1. 12032355 - Virtual metrology model based seasoning optimization