Company Filing History:
Years Active: 2020-2023
Title: Boyu Dong: Innovator in Microelectronics
Introduction
Boyu Dong is a prominent inventor based in Beijing, China. He has made significant contributions to the field of microelectronics, holding a total of six patents. His innovative work focuses on advanced sputtering methods and physical vapor deposition technologies.
Latest Patents
One of Boyu Dong's latest patents is a sputtering method that includes multiple sputtering processes. This method consists of a first pre-sputtering phase, where a target material is sputtered onto a baffle plate designed to shield a substrate. The second pre-sputtering phase involves sputtering a target material compound on the baffle plate. Finally, in the main sputtering phase, the target material compound is sputtered onto the substrate. The first pre-sputtering phase is crucial for adjusting the sputtering voltage for the main sputtering phase. Another notable patent is related to a loading apparatus and a physical vapor deposition (PVD) apparatus. This loading apparatus features a pedestal that supports a workpiece and a first support member that pushes up a cover ring when the pedestal is in an operational position. This design prevents the overlapping portion of the cover ring and the workpiece from contacting each other, thereby reducing stress forces on the workpiece from external components.
Career Highlights
Boyu Dong is currently employed at Beijing Naura Microelectronics Equipment Co., Ltd. His work at this company has allowed him to develop and refine his innovative technologies in the microelectronics sector. His contributions have been instrumental in advancing the capabilities of sputtering and deposition processes.
Collaborations
Boyu Dong collaborates with talented coworkers, including Bingliang Guo and Henan Zhang. Their teamwork fosters an environment of innovation and creativity, leading to the development of cutting-edge technologies in their field.
Conclusion
Boyu Dong is a distinguished inventor whose work in microelectronics has led to significant advancements in sputtering methods and physical vapor deposition technologies. His contributions continue to shape the future of the industry.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.