This inventor holds 2 USPTO granted patents and 1 published patent application. Top assignees: Chartered Semiconductor Manufacturing Ltd (Corporation), Globalfoundries Singapore Pte. Ltd.. Active years: 2009-2012.
Company Filing History:
1 out of 962 
1 out of 1,055 Years Active: 2009-2012
Title: Boon Meng Seah: Innovator in Wafer Cleaning Technologies
Introduction
Boon Meng Seah is a notable inventor based in Singapore, known for his contributions to the field of semiconductor manufacturing. He holds 2 patents that focus on innovative methods and apparatuses for cleaning and drying wafers. His work has significantly impacted the efficiency and effectiveness of semiconductor processing.
Latest Patents
One of Seah's latest patents is titled "Apparatus and methods for cleaning and drying of wafers." This invention describes a method and apparatus for etching and cleaning a substrate, which includes a device with a first manifold and a second manifold. The first manifold is equipped with multiple nozzles for dispensing chemicals onto the substrate, while the second manifold connects to a vacuum source and/or a dry air/gas source. Another embodiment of this patent involves a wafer cleaning device that utilizes a manifold with capillary jet nozzles and a liquid capillary jet stream to effectively clean substrates.
Another significant patent by Seah is "Protruded contact and insertion of inter-layer-dielectric material to match damascene hardmask to improve undercut for low-k interconnects." This invention outlines a process for forming a damascene opening without hardmask overhang or dielectric layer undercut/void. The low-k dielectric material is sandwiched between two hardmask films to create the dielectric film through which an interconnect opening is etched. The process involves forming a lower interconnect and an insulating layer over a semiconductor structure, followed by the creation of a first hardmask, a dielectric layer, and a second hardmask layer.
Career Highlights
Boon Meng Seah has worked with prominent companies in the semiconductor industry, including Chartered Semiconductor Manufacturing Ltd and Globalfoundries Singapore Pte. Ltd. His experience in these organizations has allowed him to develop and refine his innovative ideas in wafer processing technologies.
Collaborations
Throughout his career, Seah has collaborated with notable colleagues such as Raymond Joy and Liang Choo Hsia. These partnerships have contributed to the advancement of his inventions and the overall progress in the semiconductor field.
Conclusion
Boon Meng Seah is a distinguished inventor whose work in wafer cleaning technologies has made a significant impact on the semiconductor industry. His innovative patents and collaborations reflect his commitment to advancing technology in this critical field.