Location History:
- Gyeonggi-do, KR (2019)
- Seoul, KR (2020)
- Hwaseong-si, KR (2024)
Company Filing History:
Years Active: 2019-2024
Title: Innovations of Bong-Soo Kang in Semiconductor Fabrication
Introduction
Bong-Soo Kang is a notable inventor based in Gyeonggi-do, South Korea. He has made significant contributions to the field of semiconductor fabrication, holding three patents that showcase his innovative approaches. His work primarily focuses on optical proximity correction methods and their applications in semiconductor device manufacturing.
Latest Patents
Kang's latest patents include an optical proximity correction method and a method of fabricating a semiconductor device using the same. The optical proximity correction method involves performing an OPC operation on a design pattern of a layout, which leads to the formation of a photoresist pattern on a substrate. This process utilizes a photomask manufactured with the layout corrected by the OPC operation. The method includes generating a target pattern, performing a first OPC operation to create a correction pattern, measuring target errors, and executing a second OPC operation to refine the correction pattern further. Additionally, his method of fabricating a semiconductor device encompasses designing a layout, forming a photomask, correcting its optical transmittance, and conducting a photolithography process to create a pattern on a substrate.
Career Highlights
Bong-Soo Kang is currently employed at Samsung Electronics Co., Ltd., where he continues to advance semiconductor technology. His expertise in optical proximity correction has positioned him as a key player in the development of innovative semiconductor manufacturing techniques.
Collaborations
Kang has collaborated with notable coworkers, including Sooyong Lee and Jung-Hwan Yeom, contributing to the advancement of semiconductor technologies through teamwork and shared expertise.
Conclusion
Bong-Soo Kang's contributions to semiconductor fabrication through his innovative patents highlight his role as a leading inventor in the field. His work at Samsung Electronics Co., Ltd. continues to influence the future of semiconductor technology.