Bo-Wo Choi

Title: Bo-Wo Choi: Innovator in Semiconductor Technology

Introduction

Bo-Wo Choi is a prominent inventor based in Suwon-si, South Korea. He has made significant contributions to the field of semiconductor technology, holding a total of 3 patents. His work focuses on innovative methods and apparatuses that enhance the efficiency and effectiveness of semiconductor fabrication processes.

Latest Patents

One of Bo-Wo Choi's latest patents is a substrate processing apparatus. This apparatus includes a spin chuck that rotates a mounted substrate. It features at least one chemical liquid nozzle for applying a chemical liquid to the substrate's surface and a deionized water nozzle for providing deionized water. Additionally, it incorporates a laser device that emits a pulse wave laser beam with a period of 10 seconds or less, specifically designed for etching the edges of the substrate.

Another notable patent is a method of fabricating a semiconductor device. This method involves preparing a substrate that includes both a wafer inner region and a wafer edge region. The wafer inner region consists of a chip region and a scribe lane region. The process includes sequentially stacking a mold layer and a supporting layer on the substrate, forming a first mask layer with a stepped region, and creating a step-difference compensation pattern. The method culminates in etching the layers using a second mask pattern to form multiple holes in the mold layer.

Career Highlights

Bo-Wo Choi is currently employed at Samsung Electronics Co., Ltd., a leading company in the electronics and semiconductor industry. His work at Samsung has allowed him to push the boundaries of semiconductor technology and contribute to advancements in the field.

Collaborations

Throughout his career, Bo-Wo Choi has collaborated with notable colleagues, including Sang-jine Park and Seung-Ho Lee. These collaborations have fostered innovation and have been instrumental in the development of new technologies in semiconductor fabrication.

Conclusion

Bo-Wo Choi is a distinguished inventor whose work in semiconductor technology has led to significant advancements. His innovative patents and contributions to Samsung Electronics Co., Ltd. highlight his role as a key figure in the industry.