Bo-Hung Lin

Title: Bo-Hung Lin: Innovator in Semiconductor Technology

Introduction

Bo-Hung Lin is a prominent inventor based in Kaohsiung, Taiwan. He has made significant contributions to the field of semiconductor technology, holding a total of nine patents. His work focuses on improving processes in physical vapor deposition systems and magnetron sputtering apparatus.

Latest Patents

One of his latest patents is titled "Shielding design for metal gap fill." This invention is directed to a physical vapor deposition system that is configured to heat a semiconductor substrate or wafer. The system includes at least one heat source with lamp modules that heat the substrate while being separated by a shielding device. This innovative design allows for the heating of the semiconductor substrate, enabling the reflow of a metal film without the need for separate chambers. This advancement decreases process time, reduces the thermal budget, and minimizes substrate damage.

Another notable patent is "Rotation plus vibration magnet for magnetron sputtering apparatus." This invention relates to a plasma processing system featuring a magnetron that provides a symmetric magnetic track through a combination of vibrational and rotational motion. The magnetron includes a magnetic element that generates a magnetic field, which is attached to an elastic element connected to a rotational shaft. This design allows for concurrent motion of the magnetic element, enhancing wafer uniformity and shortening deposition time.

Career Highlights

Bo-Hung Lin has worked with leading companies in the semiconductor industry, including Taiwan Semiconductor Manufacturing Company and Chung Shan Institute of Science and Technology. His experience in these organizations has allowed him to develop and refine his innovative technologies.

Collaborations

Throughout his career, Bo-Hung Lin has collaborated with notable colleagues such as Chung-En Kao and You-Hua Chou. These partnerships have contributed to the advancement of semiconductor technologies and the successful development of his patents.

Conclusion

Bo-Hung Lin is a distinguished inventor whose work in semiconductor technology has led to significant advancements in the field. His innovative patents and collaborations with industry leaders highlight his contributions to improving manufacturing processes.