The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 05, 2015
Filed:
Feb. 24, 2012
Wen-cheng Yang, Hsinchu, TW;
Chung-en Kao, Toufen Township, TW;
You-hua Chou, Taipei, TW;
Ming-chih Tsai, Hsinchu, TW;
Chen-chia Chiang, Zhunan Township, TW;
Bo-hung Lin, Kaohsiung, TW;
Chin-hsiang Lin, Hsinchu, TW;
Wen-Cheng Yang, Hsinchu, TW;
Chung-En Kao, Toufen Township, TW;
You-Hua Chou, Taipei, TW;
Ming-Chih Tsai, Hsinchu, TW;
Chen-Chia Chiang, Zhunan Township, TW;
Bo-Hung Lin, Kaohsiung, TW;
Chin-Hsiang Lin, Hsinchu, TW;
Taiwan Semiconductor Manufacturing Co., Ltd., Hsin-Chu, TW;
Abstract
The present disclosure relates to semiconductor tool monitoring system having multiple sensors configured to concurrently and independently monitor processing conditions of a semiconductor manufacturing tool. In some embodiments, the disclosed tool monitoring system comprises a first sensor system configured to monitor one or more processing conditions of a semiconductor manufacturing tool and to generate a first monitoring response based thereupon. A redundant, second sensor system is configured to concurrently monitor the one or more processing conditions of the manufacturing tool and to generate a second monitoring response based thereupon. A comparison element is configured to compare the first and second monitoring responses, and if the responses deviate from one another (e.g., have a deviation greater than a threshold value) to generate a warning signal. By comparing the first and second monitoring responses, errors in the sensor systems can be detected in real time, thereby preventing yield loss.