Company Filing History:
Years Active: 2010-2012
Title: Bernd Schulte: Innovator in Semiconductor Layer Deposition
Introduction
Bernd Schulte is a notable inventor based in Aachen, Germany. He has made significant contributions to the field of semiconductor technology, particularly in the area of layer deposition. With a total of 2 patents, Schulte's work has advanced the methods and apparatus used in the semiconductor industry.
Latest Patents
One of Schulte's latest patents is for a CVD reactor featuring a process-chamber ceiling that can be lowered. This invention relates to an apparatus designed for the deposition of one or more layers on a substrate. The apparatus includes a process chamber arranged in a reactor housing, equipped with a heatable bottom on which the substrate rests. The design allows for the distance between the process chamber lid and the bottom to be reduced to virtually zero, enhancing the efficiency of the deposition process. Additionally, a cooling apparatus is integrated to cool the process chamber lid during layer deposition.
Another significant patent involves a process and apparatus for depositing semiconductor layers using two process gases, one of which is preconditioned. This method allows for the deposition of at least one layer, particularly a semiconductor layer, onto a substrate situated inside a process chamber. The layer comprises at least two material components introduced in a fixed stoichiometric ratio. The first reaction gas, which has a low thermal activation energy, determines the growth rate of the layer, while the second reaction gas, supplied in excess, is preconditioned by an independent energy source.
Career Highlights
Throughout his career, Bernd Schulte has worked with prominent companies in the semiconductor industry, including Aixtron AG and Aixtron, Inc. His experience in these organizations has contributed to his expertise in the development of innovative technologies for layer deposition.
Collaborations
Schulte has collaborated with notable colleagues such as Gerhard Karl Strauch and Johannes Kaeppeler. These partnerships have further enriched his work and contributed to advancements in semiconductor technology.
Conclusion
Bernd Schulte's contributions to the field of semiconductor layer deposition through his innovative patents and collaborations highlight his role as a key inventor in this industry. His work continues to influence the development of advanced technologies in semiconductor manufacturing.