Naves-Parmelan, France

Benoit Barthod


Average Co-Inventor Count = 3.0

ph-index = 5

Forward Citations = 48(Granted Patents)


Location History:

  • Cran-Gevrier, FR (1994 - 1995)
  • Naves-Parmelan, FR (2000 - 2009)

Company Filing History:


Years Active: 1994-2009

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7 patents (USPTO):Explore Patents

Title: The Innovative Journey of Benoit Barthod

Introduction

Benoit Barthod, an eminent inventor hailing from Naves-Parmelan, France, has made significant contributions to the fields of X-ray technology and extreme ultraviolet (EUV) lithography. With a remarkable portfolio that includes seven patents, Barthod continues to push the boundaries of innovation in his domain.

Latest Patents

Among his notable inventions is a "Compact source with very bright X-ray beam," which involves a device designed for the emission of X-rays. This device features a vacuum pump containing a cathode that emits a flux of electrons and a rotary anode fixed to a shaft of the vacuum pump. Additionally, it incorporates a collection device for the emitted electron beam and includes one or more cooling elements to maintain optimal performance.

Another of Barthod's groundbreaking patents is his "Apparatus for generating light in the extreme ultraviolet and use in a light source for extreme ultraviolet lithography." This advanced device includes a mechanism for creating a linear target in an evacuated space where laser beams are focused. The design allows the target to interact with these laser beams, resulting in plasma that emits radiation in the extreme ultraviolet spectrum. Such innovations play a crucial role in fabricating integrated circuits, showcasing Barthod's impact on the engineering and technology landscape.

Career Highlights

Throughout his career, Benoit Barthod has worked with prestigious companies, including Alcatel and Alcatel Cit. His experience in these companies enriched his expertise in high-tech solutions and laid the groundwork for his pioneering inventions. His ability to translate complex scientific concepts into practical applications has positioned him among the notable inventors in his field.

Collaborations

Barthod has collaborated with several esteemed colleagues during his career. Notably, he has worked alongside Jean-Pierre Chicherie, who is now deceased, as well as Patrick Philippe. These collaborations have significantly contributed to the advancements in technologies that Barthod has pioneered.

Conclusion

Benoit Barthod stands out as a prolific inventor whose innovative designs and patents continue to shape the future of X-ray and extreme ultraviolet technologies. His contributions reflect a dedication to advancing science and engineering through creativity and collaboration, making him a notable figure in the realm of modern invention.

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