Alcatel

Alcatel Cit

Alcatel Lucent

Commissariat a L'energie Atomique

Alcatel Vacuum Technology France

Benoit Barthod

Jean-Pierre Chicherie, Deceased

Patrick Philippe

Roland Bernard

Olivier Sublemontier

Denis Perrillat-Amede

Pierre-Yves Thro

Jean-Luc Rival

Philippe Cormont

Guy Cheymol

Jean-Pierre Chicherie

Martin Schmidt

Matthieu Morpain

Jean-Pierre Chicerie

Denis Perrillat Amede

Provided is a device for the emission of X-rays. The device includes a vacuum pump including a sealed peripheral casing containing a cathode which emits a flux of electrons, a rotary anode mounted at the end of the shaft of the vacuum pump, a collection device for collecting an emitted electron beam and at least one cooling element, disposed opposite one of the main radial faces of the rotary anode, which is fixed to one of the vacuum pump stator or to the sealed peripheral casing.

Compact source with very bright X-ray beam

The device comprises a device () for creating an essentially linear target () in an evacuated space where laser beams () are focused, the target being suitable for interacting with the focused laser beams () to emit a plasma emitting radiation in the extreme ultraviolet. A receiver device () receives the target () after it has interacted with the focused laser beams (), and a collector device () collects the EUV radiation emitted by the target (). The focusing elements () for focusing the laser beams on the target () are arranged in such a manner that the laser beams () are focused on the target () laterally, being situated in a common half-space relative to the target () and being inclined at a determined angle lying in the range about 60&#xb0; to about 90&#xb0; relative to a mean collection axis () perpendicular to the target (). The collector device () is disposed symmetrically about the mean collection axis () in the half-space containing the laser beams () focused on the target () and inside a conical space () centered on the mean collection axis () with a vertex situated at the target () and a half-angle at the vertex that is less than the angle of inclination of the focused laser beams () relative to the mean collection axis (). The device is suitable for use as a source for EUV radiation in lithography for fabricating integrated circuits.

Apparatus for generating light in the extreme ultraviolet and use in a light source for extreme ultraviolet lithography

The EUV radiation source of the invention comprises an irradiation chamber () containing an irradiation zone () into which a stream of radiation-generator material is generated such as a flow of xenon propagating along a direction (II&#x2014;II) extending transversely relative to an optical axis (I&#x2014;I). The irradiation zone () is in the proximity of a diaphragm () oriented on the optical axis (I&#x2014;I) and putting the irradiation chamber () into communication with a transmission chamber (). Power laser beams () strike the stream of radiation-generator material in the irradiation zone () and produce EUV radiation which propagates through the diaphragm () and which is conditioned in the transmission chamber () by elliptical mirrors (). Differential pumps () maintain a pressure Pin the transmission chamber () that is well below the pressure Pin the irradiation chamber (). The low pressure in the transmission chamber () ensures that the EUV radiation is transmitted with little attenuation to a zone of use, without requiring voluminous high speed pumps ().

EUV source

The machine includes a fixed disk (2) comprising a spiral wall (3), a mobile disk (4) also comprising a spiral wall (5) cooperating with that of the fixed disk, and means (11, 16, 22, 23) for driving circular translation movement of the mobile disk, the mobile disk being positioned axially by a system including a shoe (25, 32, 36) rubbing between two lateral abutments (26, 27-34, 35-39, 40), one member of the pair of members (i.e. the shoe or the lateral abutments, being attached to a fixed frame (1) and the other member of this pair of members being fastened to the mobile disk (4), characterized in that the fixed disk (2) is joined on the side opposite the mobile disk (4) to a fixed central shaft (7) joined to the frame (1) and including a discharge passage (8), the central shaft (7) being surrounded by a sealing bellows (12) connected at one end to the frame and at its other end to a connecting flange (10, 10A) the periphery of which, around the fixed disk (2), is joined to the mobile disk (4) beyond its spiral wall (5), the mobile disk (4) and the flange (10, 10A) forming a casing enclosing the fixed disk (2), the space (13) between the bellows (12) and the central shaft (7) constituting a suction passage, and in that the mobile disk axial positioning system is external of the internal volume of the casing (4-10, 10A), the member attached to the mobile disk, i.e. the shoe or the lateral abutments, being attached to the casing and projecting externally of it.

Scroll type fluid displacement machine

A scroll type machine including a fixed disk (5) comprising a spiral working wall (6) and a mobile disk (7) equally comprising a spiral working wall (8) cooperating with that of the fixed disk, means for driving circular translation movement of the mobile disk, a sealing bellows (15) joined at one end to a member (14) fixed with respect to the circular translation movement of the mobile disk (7) and at its other end to a fixed part (1C) of the machine, said bellows (15) separating the fluid circuit from the mechanical parts driving the mobile disk, characterized in that the fixed disk (5) is joined on the side opposite the mobile disk (7) to a fixed central shaft (10) including a discharge passage (11), said central shaft being surrounded by said bellows (15), the space (16) between said bellows and said fixed central shaft constituting a suction passage, in that a hollow main rotary shaft (19) surrounds said bellows (15) and is carried by at least one bearing (23, 24-32) in a fixed frame (1), one end of said main shaft (19) including an eccentric circular bore (18) cooperating with a drive member (14) joined to the mobile disk (7), said drive means including an electric motor rotor (25) joined to said main rotary shaft (19) and surrounding it and a fixed stator (26) surrounding said rotor.

Scroll type machine

A positive-displacement machine comprising a piston situated in a casing. The outline of the piston is hypertrochoidal, as is the outline of the hollow inside volume of the casing. The piston has n axes of symmetry, and the casing has n+1 axes of symmetry. The piston rotates inside the casing in orbital motion about the axis .DELTA.c of the casing. To obtain the rotation in orbital motion, firstly the piston is freely rotatably mounted on a crank pin that has its axis offset relative to the axis of a supporting shaft that is coaxial with the axis .DELTA.c of the casing, the shaft being rotated, and secondly the surface of the piston and the surface of the hollow inside volume of the casing are equipped with permanent magnets creating magnetic repulsion forces.

Magnetically guided positive-displacement machine

The machine includes a piston which is cylindrical in the mathematical sense, which has an axis .DELTA..sub.p, which is rotary, and which is situated in a cylindrical casing that has an axis .DELTA..sub.c, the piston having an outline that has .DELTA..sub.p axes of symmetry, the casing delimiting a hollow volume whose cross-section in a plane perpendicular to its axis .DELTA..sub.c has S.sub.c axes of symmetry, S.sub.p and S.sub.c differing from each other by unity. The axes .DELTA..sub.p and .DELTA..sub.c are parallel and are separated by a distance E, the piston and the casing delimiting at least three chambers between them, and the casing including at least one suction inlet and one delivery outlet. The positive-displacement machine further includes a ferromagnetic sprocket which has an axis .DELTA..sub.p, which is secured to the piston, which has N.sub.p teeth, and which is disposed inside a ferromagnetic toothed ring which has an axis .DELTA..sub.c and which is secured to the casing, the toothed ring being provided with N.sub.B electrical windings disposed radially, wherein the ratio N.sub.p /N.sub.B is equal to the ratio S.sub.p /S.sub.c, and wherein the N.sub.B electrical windings of the toothed ring are powered successively.

Growing community of inventors

Naves-Parmelan, France

Benoit Barthod