Barry Saville

Title: Barry Saville: Innovator in Inline Metrology

Introduction

Barry Saville is a notable inventor based in Gansevoort, GB. He has made significant contributions to the field of inline metrology, holding a total of 4 patents. His work focuses on improving the reliability and efficiency of die screening systems and inspection tools.

Latest Patents

One of his latest patents is titled "Imaging Reflectometry for Inline Screening." This invention involves a die screening system that receives die-resolved metrology data from inline metrology tools after fabrication steps. The system generates screening data for a population of dies, categorizing them into different disposition classes based on variability in the data. Another significant patent is "Advanced Inline Part Average Testing." This inspection system identifies defects in a population of dies and assigns weights to these defects, predicting their impact on reliability. The system generates defectivity scores and isolates outlier dies based on these scores.

Career Highlights

Barry Saville has worked with prominent companies in the industry, including Kla Tencor Corporation and Kla Corporation. His experience in these organizations has allowed him to develop innovative solutions that enhance the performance of metrology tools.

Collaborations

Throughout his career, Barry has collaborated with talented individuals such as Allen Park and Youseung Jin. These partnerships have contributed to the advancement of his inventions and the overall field of inline metrology.

Conclusion

Barry Saville is a distinguished inventor whose work in inline metrology has led to significant advancements in die screening and inspection systems. His patents reflect a commitment to improving the reliability and efficiency of these technologies.