The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 05, 2022
Filed:
Nov. 23, 2020
Kla Corporation, Milpitas, CA (US);
David W. Price, Austin, TX (US);
Robert J. Rathert, Mechanicsville, VA (US);
Kara L. Sherman, Milpitas, CA (US);
John Charles Robinson, Austin, TX (US);
Mike Von Den Hoff, Munich, DE;
Barry Saville, Gansevoort, GB;
Robert Cappel, Milpitas, CA (US);
Oreste Donzella, San Ramon, CA (US);
Naema Bhatti, Milpitas, CA (US);
Thomas Groos, Mengerskirchen, DE;
Teng-Song Lim, Singapore, SG;
Doug Sutherland, Milpitas, CA (US);
KLA Corporation, Milpitas, CA (US);
Abstract
An inspection system may include a controller communicatively coupled to one or more in-line sample analysis tools including, but not limited to, an inspection tool or a metrology tool. The controller may identify defects in a population of dies based on data received from at least one of the one or more in-line sample analysis tools, assign weights to the identified defects indicative of predicted impact of the identified defects on reliability of the dies using a weighted defectivity model, generate defectivity scores for the dies in the population by aggregating the weighted defects in the respective dies in the population, and determine a set of outlier dies based on the defectivity scores for the dies in the population, wherein at least some of the set of outlier dies are isolated from the population.