Dresden, Germany

Barbara Schmidt


Average Co-Inventor Count = 4.8

ph-index = 3

Forward Citations = 13(Granted Patents)


Company Filing History:


Years Active: 2005-2010

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4 patents (USPTO):

Title: Barbara Schmidt: Innovator in Integrated Device Fabrication

Introduction

Barbara Schmidt is a prominent inventor based in Dresden, Germany. She has made significant contributions to the field of integrated device fabrication, holding a total of 4 patents. Her innovative methods and apparatuses have advanced the technology used in the manufacturing of electronic devices.

Latest Patents

One of her latest patents is a "Method for controlling a process for fabricating integrated devices." This method involves ex-situ and in-situ measurements of pre-etch and post-etch dimensions for structures formed on a substrate. The results of these measurements are utilized to adjust process recipes and control the operational status of etch and external substrate processing equipment. This method is particularly useful during a multi-pass process for fabricating a capacitive structure of a trench capacitor.

Another notable patent is the "Apparatus and method for monitoring trench profiles and for spectrometrologic analysis." This apparatus includes a radiation-emitting unit that irradiates the substrate with infrared radiation. It measures the intensity and/or polarization state of the reflected infrared radiation at various measuring frequencies. An analyzing unit determines the respective reflectance and relative phase change, allowing for the identification of reflective planes within the substrate at different depths.

Career Highlights

Barbara has worked with notable companies such as Infineon Technologies AG and Nan Ya Technology Corporation. Her experience in these organizations has contributed to her expertise in the field of integrated device fabrication.

Collaborations

Throughout her career, Barbara has collaborated with esteemed colleagues, including Jörn Lützen and Stefan Rongen. These partnerships have fostered innovation and development in her projects.

Conclusion

Barbara Schmidt is a trailblazer in the realm of integrated device fabrication, with her patents reflecting her commitment to advancing technology. Her work continues to influence the industry and inspire future innovations.

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