Bang N To

Title: The Innovative Mind of Bang N To: Pioneering Patents in Silicon Etching Technology

Introduction

Bang N To, based in Yorktown Heights, NY, is an accomplished inventor with a remarkable portfolio of four patents. His work primarily focuses on advancements in semiconductor processing, specifically dealing with silicon etching and the associated cleaning processes. His innovative contributions in this field have paved the way for enhancements in etch chamber efficiency and substrate processing.

Latest Patents

Among his notable patents, Bang N To has developed a method for cleaning etch residues through the use of an aqueous lanthanoid solution. This solution effectively removes etch residues, which predominantly consist of hydrocarbons and elements such as carbon, oxygen, fluorine, nitrogen, and silicon. For example, cerium ammonium nitrate (Ce(NH)(NO)) is a preferred aqueous solution used in this innovative cleaning method. Furthermore, he has also worked on etch rate enhancements in silicon etching processes by pre-treating etch chambers. This treatment can improve etch rates by at least 50% without impacting the etch profiles during subsequent processes. By implementing periodic pretreatments, the overall throughput of the etch chamber can be significantly increased.

Career Highlights

Throughout his career, Bang N To has made significant contributions to the field of semiconductor technology while working with notable organizations such as the International Business Machines Corporation (IBM) and Zeon Corporation. His experience in these leading companies has enabled him to refine his innovative ideas and bring them to fruition through patent applications.

Collaborations

Bang N To has had the opportunity to collaborate with talented individuals such as Eric Andrew Joseph and Masahiro Nakamura. These collaborations have further enriched his understanding of the semiconductor industry and have led to the development of cutting-edge technologies in silicon processing.

Conclusion

Bang N To's innovative spirit and technical expertise have established him as a prominent figure in the field of semiconductor processing. His contributions, especially in cleaning etch residues and enhancing silicon etch rates, demonstrate his commitment to advancing technology. As he continues to develop and refine his ideas, Bang N To remains a key player in driving innovations within the industry.