Company Filing History:
Years Active: 2018-2023
Title: Balamurugan Ramasamy: Innovator in Process Chamber Technology
Introduction
Balamurugan Ramasamy is a notable inventor based in Bengaluru, India. He has made significant contributions to the field of process chamber technology, holding a total of four patents. His work focuses on enhancing the durability and performance of components used in process chambers.
Latest Patents
Ramasamy's latest patents include innovative solutions for protecting aluminum process chamber components. One of his patents describes a protective multilayer coating designed for components exposed to temperatures ranging from about 20°C to about 300°C. This coating comprises a bond layer and a top layer, which work together to reduce stress and prevent particle shedding during and after the use of the process chamber. The bond layer can include materials such as titanium, titanium nitride, and aluminum, while the top layer is made of tungsten nitride. Another patent outlines a method for fabricating chamber parts, which involves creating a coating layer on an interface layer with specific film properties. This method includes using a base structure made of aluminum or silicon-containing material and forming an interface layer with elements like Ta, Al, Si, Mg, and Y.
Career Highlights
Balamurugan Ramasamy is currently employed at Applied Materials, Inc., a leading company in the field of materials engineering. His work at Applied Materials has allowed him to develop and patent innovative technologies that enhance the performance of process chambers.
Collaborations
Ramasamy has collaborated with notable colleagues, including Mats Larsson and Kevin A Papke. These collaborations have contributed to the advancement of technologies in the field of process chamber components.
Conclusion
Balamurugan Ramasamy is a distinguished inventor whose work in process chamber technology has led to significant advancements in the industry. His innovative patents and contributions continue to shape the future of materials engineering.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.