The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 07, 2023
Filed:
May. 02, 2019
Applied Materials, Inc., Santa Clara, CA (US);
Karthikeyan Balaraman, Bangalore, IN;
Sathyanarayana Bindiganavale, Bengaluru, IN;
Rajasekhar Patibandla, Bangalore, IN;
Balamurugan Ramasamy, Bangalore, IN;
Kartik Shah, Saratoga, CA (US);
Umesh M. Kelkar, Santa Clara, CA (US);
Mats Larsson, Sunnyvale, CA (US);
Kevin A. Papke, Portland, OR (US);
William M. Lu, Sunnyvale, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Embodiments of the present disclosure are directed towards a protective multilayer coating for process chamber components exposed to temperatures from about 20° C. to about 300° C. during use of the process chamber. The protective multilayer coating comprises a bond layer and a top layer, the bond layer is formed on a chamber component to reduce the stress between the top layer and the chamber component. The reduced stress decreases or prevents particle shedding from the top layer of the multilayer coating during and after use of the process chamber. The bond layer comprises titanium, titanium nitride, aluminum, or combinations thereof, and the top layer comprises tungsten nitride.