William M Lu

Title: Innovations of William M. Lu: Pioneering Patents in Semiconductor Technology

Introduction: William M. Lu, an accomplished inventor based in Sunnyvale, CA, has made significant contributions to the field of semiconductor technology with a total of three patents to his name. His innovative work primarily focuses on enhancing process efficiency and material longevity within semiconductor manufacturing processes.

Latest Patents: Lu's latest patents showcase his commitment to advancing technology. One notable patent addresses the "Protection of Aluminum Process Chamber Components," which involves a protective multilayer coating designed for components exposed to temperatures ranging from about 20°C to about 300°C. This innovative coating features a bond layer formed on the chamber component to minimize stress between the top layer and the underlying material. By reducing stress, the invention effectively decreases the likelihood of particle shedding from the coating during and after the usage of the process chamber. The bond layer incorporates materials such as titanium, titanium nitride, aluminum, or their combinations, while the top layer is composed of tungsten nitride.

Another key patent relates to "Pre-conditioned Chamber Components." This invention introduces a process kit that includes a shield functioning as an anode within a physical deposition chamber. The shield features a cylindrical band which encircles a sputtering surface and substrate support. The design incorporates a textured interior surface with a range of features, and a film applied across selected portions of these features, featuring a porosity of approximately 2% to 3.5%.

Career Highlights: William M. Lu contributes his expertise to Applied Materials, Inc., a leading company in the semiconductor equipment industry. His work at Applied Materials focuses on innovative solutions that directly enhance the manufacturing processes for semiconductor devices, ensuring high efficiency and product reliability.

Collaborations: Throughout his career, William has collaborated with notable colleagues such as Wendell Glenn Boyd, Jr. and Joseph Frederick Sommers. These partnerships foster an environment of collective innovation, driving forward the advancement of semiconductor technologies.

Conclusion: William M. Lu’s inventive ideologies and robust patent portfolio highlight his significant impact on semiconductor manufacturing. His dedication to innovation, through the development of protective and efficient technologies, ensures that the industry continues to evolve and improve, benefiting manufacturers and consumers alike.