Location History:
- Oobu, JP (1991)
- Obu, JP (1995 - 2002)
Company Filing History:
Years Active: 1991-2002
Title: Atsushi Komura: Innovator in Semiconductor Technology
Introduction
Atsushi Komura is a prominent inventor based in Obu, Japan. He has made significant contributions to the field of semiconductor technology, holding a total of 6 patents. His work focuses on improving the reliability and efficiency of semiconductor devices.
Latest Patents
Among his latest patents is an innovative electrode for semiconductor devices and a method for manufacturing the same. The purpose of this invention is to create an electrode wiring structure that minimizes the occurrence of aluminum voids within aluminum alloy wiring, regardless of the wiring's orientation. The structure includes an interlayer insulator film, a titanium layer, a titanium nitride barrier layer, an aluminum alloy wiring layer, and a protective film, all formed on a silicon substrate. A key feature of this invention is the distortion relaxation layer, which is an intermetallic compound containing aluminum and titanium. This layer, with a thickness of over 10 nm, significantly reduces the number of aluminum voids to practically zero for every wiring width of 1 µm.
Another notable patent by Komura is also focused on the electrode for semiconductor devices, emphasizing the same structural components and benefits as mentioned above. This consistency in his inventions highlights his dedication to advancing semiconductor technology.
Career Highlights
Atsushi Komura is currently employed at Nippondenso Co., Ltd., where he continues to innovate in the semiconductor field. His work has not only contributed to the company's success but has also advanced the industry as a whole.
Collaborations
Throughout his career, Komura has collaborated with notable colleagues, including Kenji Kondo and Shoji Miura. These partnerships have fostered a creative environment that encourages innovation and the development of cutting-edge technologies.
Conclusion
Atsushi Komura's contributions to semiconductor technology through his patents and collaborations demonstrate his commitment to innovation. His work continues to influence the industry, paving the way for future advancements in semiconductor devices.