The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 21, 1991
Filed:
Nov. 29, 1989
Applicant:
Inventors:
Kenji Kondo, Hoi, JP;
Kazuo Akamatsu, Okazaki, JP;
Takeshi Yamauchi, Oobu, JP;
Tooru Yamaoka, Oobu, JP;
Atsushi Komura, Oobu, JP;
Assignee:
Nippondenso Co., Ltd., Kariya, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
357 67 ; 357 65 ; 357 71 ; 437957 ; 428469 ; 428472 ;
Abstract
An aluminum line including nitrogen formed as a film in a semiconductor integrated circuit is disclosed. Each crystal grain size of the aluminum line is lower than or equal to 0.3 .mu.m to suppress electromigration. A method of forming the aluminum line which can supress electromigration is also disclosed. The amount of an inert gas Q and the amount of a nitrogen gas Q.sub.N are controlled to satisfy '2.ltoreq.(Q.sub.N /Q).times.100.ltoreq.10'.