Location History:
- Yokohama, JP (1995 - 1998)
- Oita, JP (1998 - 2007)
Company Filing History:
5 out of 52,735 
2 out of 10,326 
Years Active: 1995-2007
Title: Atsuo Sanda: Innovator in Vacuum Processing Technology
Introduction
Atsuo Sanda is a prominent inventor based in Oita, Japan. He has made significant contributions to the field of vacuum processing technology, holding a total of 5 patents. His innovative work has paved the way for advancements in etching processing apparatuses.
Latest Patents
One of Atsuo Sanda's latest patents is a vacuum processing apparatus and substrate transfer method. This etching processing apparatus features a transfer chamber, multiple processing chambers, and several cassette chambers. Inside the transfer chamber, a transfer mechanism is provided. A control device pauses the operation of the vacuum pump after closing an opening/closing valve of a vacuum evacuating mechanism. This mechanism vacuum evacuates the transfer chamber when the operation of the transfer mechanism is paused for a predetermined time or longer. As a result, conservation of energy becomes possible without causing a decrease in productivity.
Career Highlights
Atsuo Sanda has worked with notable companies such as Kabushiki Kaisha Toshiba and Tokyo Electron Limited. His experience in these organizations has contributed to his expertise in vacuum processing technologies.
Collaborations
Some of his coworkers include Makoto Hasegawa and Toshihiko Kitoku. Their collaboration has likely fostered an environment of innovation and creativity in their projects.
Conclusion
Atsuo Sanda's contributions to vacuum processing technology demonstrate his commitment to innovation and efficiency. His patents reflect a deep understanding of the complexities involved in etching processing apparatuses.