This inventor holds 3 USPTO granted patents and 1 EPO patent. Top assignees: Kla Tencor Corporation, Kla Corporation. Active years: 2018-2023.
Company Filing History:
Years Active: 2018-2023
Title: Innovations of Ashok Varadarajan
Introduction
Ashok Varadarajan is an accomplished inventor based in Fremont, CA. He has made significant contributions to the field of technology, particularly in the areas of specimen alignment and defect detection in semiconductor manufacturing. With a total of 3 patents, his work has had a notable impact on the industry.
Latest Patents
One of Ashok's latest patents focuses on the alignment of a specimen for inspection and other processes. This patent provides methods and systems for setting up the alignment of a specimen. The system includes computer subsystems configured to acquire two-dimensional (2D) images generated from the output of a detector at template locations in corresponding areas of printed instances on a specimen. The computer subsystems determine offsets in the x and y directions between the template locations using the 2D images and calculate the angle of the specimen concerning the output acquisition subsystem based on these offsets. If the angle exceeds a predetermined value, the computer subsystems rotate the specimen and repeat the alignment steps. If the angle is less than the predetermined value, one of the 2D images is stored for alignment in a subsequent process. The 2D images may include multi-mode images, which can be fused before determining the offsets.
Another significant patent by Ashok addresses repeater defect detection. This innovation allows for the detection of repeater defects on a wafer by fusing multiple die images. In this instance, multiple die images are statistically fused to create a die-fused image. Each die image can represent a different die on a wafer, and the presence of a repeater defect is detected in the die-fused image. The die images can be generated using a laser-scanning system or other technologies.
Career Highlights
Throughout his career, Ashok has worked with notable companies, including Kla Tencor Corporation and Kla Corporation. His experience in these organizations has contributed to his expertise in the field of semiconductor technology.
Collaborations
Ashok has collaborated with several professionals in his field, including Premchandra M Shankar and Xuguang Jiang. These collaborations have further enhanced his work and innovations.
Conclusion
Ashok Varadarajan is a prominent inventor whose contributions to specimen alignment and defect detection have advanced the semiconductor industry. His innovative patents and collaborations reflect his commitment to technological advancement.