Hitachi, Japan

Asao Isobe


Average Co-Inventor Count = 4.0

ph-index = 9

Forward Citations = 245(Granted Patents)


Location History:

  • Hitachi, JA (1976 - 1977)
  • Hitachi, JP (1978 - 1995)

Company Filing History:


Years Active: 1976-1995

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16 patents (USPTO):Explore Patents

Title: Asao Isobe: Innovator in Semiconductor Technology

Introduction

Asao Isobe is a prominent inventor based in Hitachi, Japan, known for his significant contributions to semiconductor technology. With a total of 16 patents to his name, Isobe has made remarkable advancements in the field, particularly in methods of forming patterns and creating semiconductor devices.

Latest Patents

One of Isobe's latest patents focuses on a method of forming patterns and making semiconductor devices. This innovation addresses the issue of electrical charge accumulation caused by exposure to a charged particle beam during the formation of latent image patterns. By utilizing a bottom-resist layer comprising a radiation-induced conductive composition, the positional deviation of the pattern can be minimized. Furthermore, the patent describes how highly integrated semiconductor devices can be produced easily and with high yields. The positional deviation can be further reduced by exposing a charge particle beam patterning apparatus simultaneously with actinic radiation, such as ultraviolet light, X-ray, and infrared light. Another notable patent involves a photosensitive resin composition that includes an alkaline aqueous solution-soluble novolak resin, a photosensitizer derived from a polyhydroxy compound and 1,2-naphthoquinone-(2)-diazido-5(or 4)-sulfonyl chloride, and an ultraviolet absorber. This composition exhibits strong absorption against light with a wavelength of 365 nm, making it suitable for producing semiconductor elements.

Career Highlights

Throughout his career, Asao Isobe has worked with notable companies, including Hitachi Chemical Company, Ltd. and Hitachi, Ltd. His work has significantly impacted the semiconductor industry, leading to advancements that enhance the efficiency and effectiveness of semiconductor devices.

Collaborations

Isobe has collaborated with esteemed colleagues, including Shigeru Koibuchi and Katsushige Tsukada. These partnerships have contributed to the development of innovative technologies in the semiconductor field.

Conclusion

Asao Isobe's contributions to semiconductor technology through his patents and collaborations have established him as a key figure in the industry. His innovative methods continue to influence the development of advanced semiconductor devices.

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