Location History:
- Mangalore, IN (2018 - 2019)
- Karnataka, IN (2019)
Company Filing History:
Years Active: 2018-2019
Title: Innovations by Arun Lobo in Advanced Process Control
Introduction
Arun Lobo is a notable inventor based in Mangalore, India. He has made significant contributions to the field of advanced process control through his innovative patents. With a total of 3 patents, Lobo's work focuses on integrating advanced technologies to enhance inspection and analysis systems.
Latest Patents
One of Arun Lobo's latest patents is titled "Integrated scanning electron microscopy and optical analysis techniques for advanced process control." This invention involves a sample analysis system that includes a scanning electron microscope, an optical and/or eBeam inspection system, and an optical metrology system. The system is designed to receive selected regions of interest from the sample and generate critical dimension uniformity maps based on inspections performed by the scanning electron microscope and the optical systems. It also determines process tool control parameters based on inspection results.
Another significant patent is "Automatic deskew using design files or inspection images." This innovation automates the deskew process for image review, aligning inspection and review coordinate systems. A controller communicates with a review tool to align design files or inspection images with actual images of the wafer, generating a deskew transform of coordinates to ensure accurate analysis.
Career Highlights
Arun Lobo is currently employed at Kla Tencor Corporation, where he continues to develop cutting-edge technologies in the field of semiconductor manufacturing. His work has been instrumental in improving the efficiency and accuracy of inspection systems.
Collaborations
Lobo collaborates with talented individuals such as Arpit Jain and Arpit Yati, contributing to a dynamic team focused on innovation and excellence in technology.
Conclusion
Arun Lobo's contributions to advanced process control through his patents demonstrate his commitment to innovation in the field. His work not only enhances the capabilities of inspection systems but also sets a benchmark for future advancements in technology.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.