Location History:
- Rossdorf, DE (2015 - 2016)
- Koenigsbronn, DE (2018 - 2021)
Company Filing History:
Years Active: 2015-2025
Title: Arno Schmittner: Innovator in Lithography Technology
Introduction
Arno Schmittner is a notable inventor based in Koenigsbronn, Germany. He has made significant contributions to the field of lithography, holding a total of seven patents. His work focuses on enhancing optical elements used in advanced lithography systems.
Latest Patents
One of Schmittner's latest patents is a field facet system for a lithography apparatus. This system includes an optical element with an elastically deformable facet portion that has a light-reflecting optically active surface. The design incorporates at least one actuating element that introduces a bending moment into the facet portion, allowing for the adjustment of the radius of curvature of the optically active surface. The facet portion is uniquely curved in an arched manner when viewed from above. Additionally, the rigidity of the facet portion can be varied, enabling precise control over the orientation of the normal vector relative to the optically active surface.
Another significant patent is a method for repairing reflective optical elements used in EUV lithography. This cost-effective method addresses damage caused by hydrogen bubbles in the reflective coatings of optical elements. The process involves localizing the damaged area and covering it with materials that have low hydrogen permeability. This innovative approach is particularly beneficial for collector mirrors used in EUV lithography, ensuring the longevity and effectiveness of these critical components.
Career Highlights
Throughout his career, Arno Schmittner has worked with prominent companies in the field, including Carl Zeiss SMT GmbH and Hottinger Baldwin Messtechnik GmbH. His experience in these organizations has contributed to his expertise in optical technologies and lithography systems.
Collaborations
Schmittner has collaborated with notable colleagues such as Ralf Scherer and Holger Kierey. These partnerships have fostered innovation and advancements in the technologies he has developed.
Conclusion
Arno Schmittner's contributions to lithography technology through his patents and collaborations highlight his role as a leading inventor in the field. His innovative approaches continue to influence the development of advanced optical systems.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.