Company Filing History:
Years Active: 2012-2023
Title: The Innovative Contributions of Andy M Ray
Introduction
Andy M Ray is a notable inventor based in Newburyport, MA (US). He has made significant contributions to the field of ion implantation technology, holding a total of 8 patents. His work focuses on enhancing the precision and efficiency of ion beam processes, which are critical in various applications, including semiconductor manufacturing.
Latest Patents
One of Andy's latest patents is titled "Method of mixing upstream and downstream current measurements for inference of the beam current at the bend of an optical element for realtime dose control." This invention involves an ion implantation system that includes an ion source and a mass analyzer designed to form and analyze an ion beam. The system features a bending element positioned downstream of the mass analyzer, with measurement apparatuses that determine the ion beam current both upstream and downstream of the bending element. This innovation allows for real-time control of the implant current based on the measured currents.
Another significant patent is "Beam profiling speed enhancement for scanned beam implanters." This patent describes a method where an ion beam is tuned to a specific process recipe and scanned at varying frequencies. The invention includes a beam profiling apparatus that measures the properties of the scanned ion beam, allowing for the determination of beam profiles that enhance the efficiency of ion implantation into workpieces.
Career Highlights
Andy M Ray is currently employed at Axcelis Technologies, Inc., where he continues to develop innovative solutions in ion implantation technology. His expertise and contributions have positioned him as a key figure in advancing the capabilities of ion beam systems.
Collaborations
Throughout his career, Andy has collaborated with notable colleagues, including Bo H Vanderberg and Steven C Hays. These collaborations have fostered a dynamic environment for innovation and development in their field.
Conclusion
Andy M Ray's contributions to ion implantation technology through his patents and work at Axcelis Technologies, Inc. highlight his role as a leading inventor in this specialized area. His innovative approaches continue to influence the industry and pave the way for future advancements.