Location History:
- Tao-Yuan Hsien, TW (2008 - 2010)
- Taoyuan County, TW (2010 - 2011)
- Taoyuan, TW (2012)
Company Filing History:
Years Active: 2008-2012
Title: An-Hsiung Liu: Innovator in Wafer Alignment Technology
Introduction
An-Hsiung Liu is a prominent inventor based in Taoyuan, Taiwan. He has made significant contributions to the field of semiconductor technology, particularly in wafer alignment methods. With a total of six patents to his name, Liu's work has advanced the precision and efficiency of semiconductor manufacturing processes.
Latest Patents
Liu's latest patents include a method for wafer alignment and an innovative alignment mark arrangement. The method for wafer alignment involves several steps, starting with the provision of a wafer that includes a first material layer and a second material layer on top of the first. The first material layer features a first alignment mark, which is crucial for the alignment process in an exposure tool. Following this, the second material layer is patterned to create a second alignment mark, and the offset distance between the two alignment marks is measured within the exposure tool. Additionally, his alignment mark arrangement consists of a first alignment pattern with multiple parallel first stripes on a substrate, each having a specific dimension. This pattern is overlapped by a second alignment pattern with larger parallel second stripes, enhancing the alignment process.
Career Highlights
An-Hsiung Liu is currently employed at Nan Ya Technology Corporation, where he continues to innovate in the semiconductor field. His work has been instrumental in improving the accuracy of wafer alignment, which is critical for the production of high-quality semiconductor devices.
Collaborations
Liu has collaborated with notable colleagues such as Chiang-Lin Shih and Pei-Ing Paul Lee. Their combined expertise has contributed to the advancement of technologies in their field.
Conclusion
An-Hsiung Liu's contributions to wafer alignment technology exemplify his dedication to innovation in the semiconductor industry. His patents reflect a commitment to enhancing manufacturing processes, making him a key figure in this technological domain.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.