Alvaro Garcia

Title: Alvaro Garcia: Innovator in Plasma Thermometry

Introduction

Alvaro Garcia is a notable inventor based in Mountain View, CA. He has made significant contributions to the field of thermometry, particularly in plasma environments. His innovative approach has led to the development of a unique method for measuring substrate temperatures without direct contact.

Latest Patents

Garcia holds a patent for "Etalon thermometry for plasma environments." This patent describes a method and apparatus for determining the temperature of a substrate within a processing chamber. The technology utilizes an etalon assembly and a heterodyning effect to accurately measure the first temperature of a substrate. This measurement is achieved without physically contacting the substrate, enhancing the precision of temperature readings. Additionally, a separate temperature sensor measures a second temperature of the substrate or its support, allowing for calibration and adjustment of process parameters within the chamber.

Career Highlights

Alvaro Garcia is currently employed at Applied Materials, Inc., a leading company in the semiconductor and display industries. His work focuses on advancing technologies that improve manufacturing processes and product quality. With a patent portfolio that includes 1 patent, Garcia continues to push the boundaries of innovation in his field.

Collaborations

Throughout his career, Garcia has collaborated with esteemed colleagues such as Bruce E. Adams and Samuel C. Howells. These partnerships have fostered a collaborative environment that encourages the exchange of ideas and advancements in technology.

Conclusion

Alvaro Garcia's contributions to plasma thermometry exemplify the spirit of innovation in the technology sector. His work not only enhances the accuracy of temperature measurements but also plays a crucial role in improving manufacturing processes.